Py-ReX
Pyrolyzer for highly toxic or electrochemically inactive gases
The Py-ReX pyrolyzer module is an add-on for the D-ReX PoS gas detector, which uses its integrated pump for extractive gas detection. When used in combination with the Py-ReX, the D-ReX is able to detect gases which are too toxic or too chemically inactive to be measured directly.
Gas detection utilizing a pyrolyzer
The use of a pyrolyzer extends the possibilities of gas detection in semiconductor manufacturing and facilitates compliance with strict quality standards as well as optimizing manufacturing processes.
For any process requiring the measurement of gases which are either too toxic or too electrochemically inactive to be measured directly, a pyrolyzer is essential. Building upon the capabilities of the D-ReX PoS, the Py-ReX was developed to detect such gases in extraction mode. It is mounted between the sampling point and the gas detector. The gas you need to measure is then guided through the pyrolyzer using a pump, before reaching the sensor inside the D-ReX, where it is measured, after completing the pyrolysis.
How does pyrolysis work?
A pyrolyzer dissolves the original gas (target gas) into a measurable gas (measured gas). This step is necessary for measuring some gases, since they cannot be detected without it. The concentration of the measured gas can then be used to calculate the concentration of the target gas.
The Py-ReX is a filament pyrolyzer. A filament in a quartz glass tube is heated to a specific temperature that is precisely adjusted to the target gas. On contact with the filament, the target gas decomposes into the measured gas and can then be detected by the electrochemical smart sensor in the gas detector.
Which gases can be detected?
The Py-ReX specializes in measuring the mainly fluorine-based gases used for inerting in the manufacture of semiconductors and in other industrial processes. However, it can of course also detect other inert, non-fluorine-based gases such as 1,2-dichloroethene and is therefore suitable for a wide range of applications.
An overview of the gases we offer the Py-ReX for can be found at the bottom of this page. In close cooperation with our customers, we are constantly working on improving to be able to detect even more gases. Therefore, please contact us if the gas you need to detect is not yet listed in our overview.
In a nutshell:
Equipment and features:
- Pyrolysis method: Filament pyrolysis
- Communication: 4-20 mA
- 2 colored status LEDs
- Housing for DIN rail mounting (TS35)
- Maximum tube length: 30 m
- Heating current monitoring on the D-ReX PoS
- Optional: Line Integrity Monitoring on the D-ReX PoS
