Semiconductor Industry

Semiconductor manufacturing is a highly specialized process industry that uses a wide range of toxic, flammable, and highly reactive gases. Even very small leaks can pose serious risks to personnel, disrupt sensitive processes, and cause costly production downtime. Gas detection is therefore an integral part of both occupational safety and stable, high-yield semiconductor production.

Gas monitoring in the semiconductor industry

Semiconductor fabs use specialty gases for processes such as etching, deposition, ion implantation, and cleaning. Typical risk areas include cleanrooms, gas cabinets, valve manifold boxes (VMBs), sub-fab utility areas, bulk gas supply systems, and exhaust and abatement systems. Many of the gases used are hazardous even at very low concentrations and require continuous monitoring. Fixed gas detection systems are the primary safety measure in semiconductor facilities. They provide continuous monitoring of toxic and flammable gases in production areas, sub-fabs, gas supply systems, and exhaust ducts, enabling rapid detection of leaks and abnormal process conditions. Portable gas detectors are used for maintenance, commissioning, troubleshooting, and leak checks. They support pre-entry testing and personal protection during temporary work on gas supply lines, process tools, and technical installations.

Potential dangers

» toxic process gases
» flammable and pyrophoric gases
» corrosive gases
» hydrogen
» confined technical spaces

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