D-ReX PoS² - Gas detection system for the real-world requirements of the semiconductor industry
Based on the proven D-ReX platform, the D-ReX PoS² combines compact design, high measurement precision, and maximum service convenience. Specifically developed for the requirements of semiconductor manufacturing, it enables reliable gas monitoring even in areas with very limited space. The integrated pump safely draws in the sample gas at the point of sampling (PoS) – over distances of up to 30 meters from the device, for example from pipelines, gas distribution systems, gas storage areas, scrubbers, or cleanrooms. For maintenance purposes, the device front can be opened without tools, giving quick access to the sensor and pump mechanism. Integration into higher-level systems is achieved via Power over Ethernet (PoE) or via the industry standards 4–20 mA and Modbus (RS-485).
USPs
Easy and quick service
- No tools required to replace the sensor or the pump
- Easy installation and quick device replacement
- Space-saving design (wall-mounted or DIN rail)
Low cost of ownership
- Easy maintenance saves time and money
- Only worn parts (e.g. sensor cartridge, pump mechanism) need to be replaced
- Power over Ethernet (PoE) reduces wiring effort (data communication and power supply via Ethernet)
Features
- Optional line integrity monitoring
- Large 2.4" color display
- Three internal relays (freely programmable)
- Flexible communication interfaces: 4–20 mA, Modbus (RS-485), or Ethernet
Designed for real-world semiconductor fab requirements
The D-ReX PoS² is a space- and cost-saving gas detection device for a wide range of applications. The sample gas is drawn in by the integrated pump, and the smart sensor detects hazardous gas concentrations — both instantaneous and long-term average values. For gases that require a pyrolyzer, we offer the additional Py-ReX module.
Smart sensors and easy servicing
Electrochemical, catalytic, infrared, and PID sensors for more than 60 toxic, corrosive, and combustible gases as well as oxygen are available. The sensors are pre-configured, and the sensor cartridges can be replaced quickly and easily after opening the front panel — completely without tools. Only actual wear parts, such as sensors and the pump mechanism, are replaced, while the sensor cassette and pump electronics are reused. This minimizes both maintenance costs and effort.
Flexible installation
Whether mounted on a wall or DIN rail – the D-ReX PoS² adapts to your installation requirements. When replacing the gas detection unit, only two clips need to be released; the connection terminal with wiring and tubing remains in place. The transmitter unit can be exchanged just as quickly and easily as the sensor cartridge.
Clear and precise information
The large TFT color display provides all necessary information on the monitored gas, the measured concentration, the device status, and any faults in plain text – allowing immediate recognition and response.
Modern communication
For state-of-the-art connectivity, the D-ReX PoS² is equipped with a PoE-enabled LAN interface (10/100 Mbit/s) for fast and secure data transmission and the capability to be addressed via network or internet. Alternatively, analog integration into a 4–20 mA infrastructure or digital communication via the proven RS-485 industry standard (Modbus) is also possible. To implement safety actions, the D-ReX PoS² features three internal relays with single-pole changeover contacts for free programming — for example, to trigger external alarms or close valves.
Measured gases
| AsH3 | Arsine | |
| B2H6 | Diborane | |
| Br2 | Bromine | |
| Cl2 | Chlorine | |
| ClF3 | Chlorine trifluoride | |
| ClO2 | Chlorine dioxide | |
| CO | Carbon monoxide | |
| CO2 | Carbon dioxide | |
| COCl2 | Phosgene | |
| ETO | Ethylene oxide | |
| F2 | Fluorine | |
| GeH4 | Germanium | |
| H2 | Hydrogen |
| H2S | Hydrogen sulfide |
| HBr | Hydrogen bromine |
| HCl | Hydrogen chloride |
| HCN | Hydrogen cyanide |
| HF | Hydrogen fluoride |
| HMDS | Hexamethyldisilazane |
| N2H4 | Hydrazine |
| N2O | Nitrous oxide |
| NH3 | Ammonia |
| NO | Nitric oxide |
| NO2 | Nitrogen dioxide |
| O2 | Oxygen |
| O3 | Ozone |
| PH3 | Phosphine |
| SeH2 | Hydrogen selenide |
| SiH4 | Silane |
| SO2 | Sulfur dioxide |
| TEOS | Tetraethyl orthosilicate |
| TMB | Trimethyl borate |
| LEL | Combustible gases and vapors |
| C2H4Cl2 | Dichloroethane |
| C4F6* coming soon | Hexafluorobutadiene |
| CH3F* | Methyl fluoride |
| NF3* | Nitrogen trifluoride |